Simulation and Fabrication of Silicon Field Emission Cathodes for Cold Electron Sources

We report on the simulation and fabrication of nanostructured silicon surfaces for field emission (FE) applications, e.g. ionization sensors and x-ray tubes. For the design and optimization of field-emitting silicon structures, the influence of the geometric parameters like tip height, apex radius,...

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Bibliographic details
Volume: 1024
Main Author: Prommesberger, Christian
Langer, Christoph
Dams, Florian
Lawrowski, Robert
Schreiner, Rupert
Format: Journal Article
Language: English
Place of publication: 28.08.2014
published in: Advanced materials research Vol. 1024; pp. 48 - 51
Data of publication: 20140828
ISSN: 1022-6680
1662-8985
1662-8985
EISSN: 1662-8985
Discipline: Engineering
Bibliography: Selected, peer reviewed papers from the 3rd International Conference on the Advancement of Materials and Nanotechnology 2013 (ICAMN III 2013), November 19-21, 2013, Penang
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Online Access: Fulltext
Database: CrossRef
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