Vacuum-sealed field emission electron gun

A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase ( &l...

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Bibliographic details
Volume: 38
Main Author: Bachmann, Michael
Düsberg, Felix
Langer, Christoph
Herdl, Florian
Bergbreiter, Lukas
Dams, Florian
Miyakawa, Natuski
Eggert, Tobias
Pahlke, Andreas
Edler, Simon
Prommesberger, Christian
Ławrowski, Robert
Hausladen, Matthias
Schreiner, Rupert
Format: Journal Article
Language: English
Place of publication: MELVILLE A V S AMER INST PHYSICS 01.03.2020
published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 38; no. 2; pp. 23203 - 23206
ORCID: 0000-0002-9867-2379
0000-0003-4936-270X
Data of publication: 20200300
ISSN: 2166-2746
2166-2754
EISSN: 2166-2754
Discipline: Engineering
Physics
Subjects:
Online Access: available in Bonn?
CODEN: JVTBD9
Database: Web of Knowledge
Web of Science - Science Citation Index Expanded - 2020
Science Citation Index Expanded
Web of Science
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