APA Citation

Langer, C., Bomke, V., Hausladen, M., Ławrowski, R., Prommesberger, C., Bachmann, M., & Schreiner, R. (2020). Silicon chip field emission electron source fabricated by laser micromachining. Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 38(1), pp. 13202-13210. doi:10.1116/1.5134872

Chicago Citation

Langer, Christoph, Vitali Bomke, Matthias Hausladen, Robert Ławrowski, Christian Prommesberger, Michael Bachmann, and Rupert Schreiner. "Silicon Chip Field Emission Electron Source Fabricated By Laser Micromachining." Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics 38, no. 1 (2020): 13202-13210.

MLA Citation

Langer, Christoph, et al. "Silicon Chip Field Emission Electron Source Fabricated By Laser Micromachining." Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics 38.1 (2020): 13202-13210.

Warning: These citations may not always be 100% accurate.