Extraction of the current distribution out of saturated integral measurement data of p-type silicon field emitter arrays

At the moment, only complicated techniques are known for the determination of array properties of field emitter arrays such as the number of active tips, the current distribution, or the individual tip radii. In this work, a method for extracting these parameters from integral measurement data is pr...

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Bibliographic details
Volume: 36
Main Author: Breuer, Janis
Bachmann, Michael
Düsberg, Felix
Pahlke, Andreas
Edler, Simon
Langer, Christoph
Prommesberger, Christian
Ławrowski, Robert
Schreiner, Rupert
Serbun, Pavel
Lützenkirchen-Hecht, Dirk
Format: Journal Article
Language: English
Place of publication: MELVILLE A V S AMER INST PHYSICS 01.09.2018
published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 36; no. 5; pp. 51805 - 51813
Data of publication: 20180900
ISSN: 2166-2746
EISSN: 2166-2754
Discipline: Engineering
Online Access: available in Bonn?
Database: Web of Knowledge
Science Citation Index Expanded
Web of Science
Web of Science - Science Citation Index Expanded - 2018
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