Field emission properties of p-type black silicon on pillar structures

Arrays of black silicon field emission pillar structures were fabricated on p-type silicon substrates. Two types of samples with the same number of pillars (arrays of 10 × 10) but different pillar heights (8 and 20 μm) were prepared as well as a black silicon reference sample without pillars. The fi...

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Bibliographic details
Volume: 34
Main Author: Langer, Christoph
Prommesberger, Christian
Ławrowski, Robert
Schreiner, Rupert
Serbun, Pavel
Müller, Günter
Düsberg, Felix
Hofmann, Martin
Bachmann, Michael
Pahlke, Andreas
Format: Journal Article
Language: English
Place of publication: MELVILLE A V S AMER INST PHYSICS 01.03.2016
published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 34; no. 2; pp. 2 - 8
Data of publication: 20160300
ISSN: 2166-2746
2166-2754
EISSN: 2166-2754
Discipline: Engineering
Physics
Subjects:
Online Access: available in Bonn?
CODEN: JVTBD9
Database: Web of Knowledge
Science Citation Index Expanded
Web of Science
Web of Science - Science Citation Index Expanded - 2016
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