Homogeneous Field Emission Cathodes With Precisely Adjustable Geometry Fabricated by Silicon Technology

Silicon-based cathodes with precisely aligned field emitter arrays of sharp tips applicable for miniaturized electron sources were successfully fabricated and characterized. This was made possible by an improved fabrication process using wet thermal oxidation, wet etching, and reactive-ion etching s...

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Bibliographic details
Volume: 59
Main Author: Dams, F
Navitski, A
Prommesberger, C
Serbun, P
Langer, C
Muller, G
Schreiner, R
Format: Journal Article
Language: English
Zielgruppe: Trade
Academic
Place of publication: PISCATAWAY IEEE 01.10.2012
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Institute of Electrical and Electronics Engineers
Institute of Electrical and Electronics Engineers, Inc
published in: IEEE transactions on electron devices Vol. 59; no. 10; pp. 2832 - 2837
Data of publication: 2012-Oct.
ISSN: 0018-9383
1557-9646
EISSN: 1557-9646
Discipline: Engineering
Physics
Applied Sciences
Subjects:
Online Access: available in Bonn?
CODEN: IETDAI
Database: Web of Knowledge
Science Citation Index Expanded
Web of Science
Web of Science - Science Citation Index Expanded - 2012
Pascal-Francis
CrossRef
Academic OneFile (A&I only)
Database information Databases - DBIS