Monitoring steam laser cleaning using optical probe techniques

Steam laser cleaning of alumina and titanium carbide nanoparticles from silicon substrates is presented. A KrF excimer laser with a wavelength of 248 nm was used to irradiate the substrates in laser cleaning. A water layer of micrometer thickness was deposited on silicon substrates to improve the cl...

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Bibliographic details
Volume: 5713
Main Author: Batta, Nagaraj
Lu, Yongfeng
Wang, Xinwei
Shi, Jing
Thompson, Daniel W
Doerr, David W
Alexander, Dennis R
Format: Conference Proceeding
Language: English
Place of publication: SPIE 12.04.2005
published in: Proceedings of SPIE Vol. 5713; no. 1; pp. 436 - 444
Data of publication: 20050412
ISBN: 9780819456878
081945687X
ISSN: 0277-786X
Discipline: Engineering
Applied Sciences
Bibliography: Conference Location: San Jose, California, United States
Conference Date: 2005-01-22|2005-01-27
Online Access: available in Bonn?
CODEN: PSISDG
Database: Database information not found
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