Submicron patterning of aluminum films by laser ablation

Microfabrication of sub-micron holes on 30 nm thick aluminum films on fused silica was investigated using pulse durations form 300 fs to 6 ns at 400 nm wavelength. Micromachined areas were investigate using atomic force microscopy for quality and size of features produced. Ablation diameters less th...

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Bibliographic details
Volume: 3874
Main Author: Doerr, David W
Alexander, Dennis R
Format: Conference Proceeding
Language: English
Place of publication: SPIE 30.08.1999
published in: Proceedings of SPIE Vol. 3874; no. 1; pp. 62 - 67
Data of publication: 19990830
ISBN: 081943471X
ISSN: 0277-786X
Discipline: Engineering
Bibliography: Conference Location: Santa Clara, CA, USA
Conference Date: 1999-09-20|1999-09-22
Online Access: available in Bonn?
Database: Database information not found
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