An inkjet head cleaning apparatus, an inkjet head cleaning method, and a substrate processing method

The invention discloses an inkjet head cleaning apparatus, an inkjet head cleaning method, and a substrate processing method. The inkjet head cleaning apparatus includes: a blade body rotatable abouta rotation axis and extending in a direction perpendicular to the rotation axis; an ejection port for...

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Bibliographic details
Main Author: LEE JAE HAK
KO HAN SEO
KANG SEUNG HWAN
HA BYUNG JIN
SOHN DONG KEE
Format: Patent
Language: Chinese, English
Place of publication: 18.09.2020
Related: RESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV
SAMSUNG DISPLAY CO LTD
Data of publication: 20200918
Alternate Title: 喷墨头清洁装置、喷墨头清洁方法及基板处理方法
Discipline: Medicine
Chemistry
Sciences
Bibliography: Application Number: CN201910897400
Subjects:
Online Access: available in Bonn?
Database: esp@cenet
Database information Databases - DBIS