System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system

An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a rotating compensator, positioned between the analyzer and the dispersi...

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Bibliographic details
Main Author: WOOLLAM; JOHN A
CHRISTENSON; REED A
PITTAL; SHAKIL A
DOERR; DAVID W
GREEN; STEVEN E
JOHS; BLAINE D
Format: Patent
Language: English
Place of publication: 28.05.1996
Related: J. A. WOOLLAM CO. INC
Edition: 6
Data of publication: 19960528
Discipline: Medicine
Chemistry
Sciences
Physics
Bibliography: Application Number: US19940265325
Subjects:
Online Access: available in Bonn?
Database: esp@cenet
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