Laser machining of materials

Disclosed are systems and methods for reducing the adverse effects of particles which become dislodged by scribing and laser machining of materials, which dislodged particles otherwise accumulate on laser machined material surfaces and cause adverse effects.

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Bibliographic details
Main Author: Alexander, Dennis R
Milulka, Brian W
Doerr, David W
Format: Patent
Language: English
Place of publication: 08.03.2005
Related: The Board of Regents of the University of Nebraska
Data of publication: 20050308
Online Access: available in Bonn?
Database: USPTO Issued Patents
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